DocumentCode
3419459
Title
Modeling and simulation considerations for a new micro-electro-mechanical switch - toggle switch
Author
Schauwecker, B. ; Mehner, J. ; Luy, J.-F.
Author_Institution
DaimlerChrysler Res. Center, Ulm, Germany
fYear
2003
fDate
11-11 April 2003
Firstpage
192
Lastpage
195
Abstract
This paper presents the mechanical and electrostatic model and simulation results of a new micro-electro-mechanical cantilever switch for RF applications. Local stress concentrations at notches, eigenfrequencies, pushand pull voltages, settling and switching time, air pressure distribution and the fluid velocity during the switching of the cantilever are discussed.
Keywords
microswitches; RF-MEMS device; electrostatic model; mechanical model; micro-electro-mechanical cantilever switch; toggle switch; Analytical models; Contacts; Electrodes; Electrostatics; Micromechanical devices; Radio frequency; Springs; Stress; Switches; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Silicon Monolithic Integrated Circuits in RF Systems, 2003. Digest of Papers. 2003 Topical Meeting on
Conference_Location
Grainau, Germany
Print_ISBN
0-7803-7787-7
Type
conf
DOI
10.1109/SMIC.2003.1196703
Filename
1196703
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