Title :
Modeling and simulation considerations for a new micro-electro-mechanical switch - toggle switch
Author :
Schauwecker, B. ; Mehner, J. ; Luy, J.-F.
Author_Institution :
DaimlerChrysler Res. Center, Ulm, Germany
Abstract :
This paper presents the mechanical and electrostatic model and simulation results of a new micro-electro-mechanical cantilever switch for RF applications. Local stress concentrations at notches, eigenfrequencies, pushand pull voltages, settling and switching time, air pressure distribution and the fluid velocity during the switching of the cantilever are discussed.
Keywords :
microswitches; RF-MEMS device; electrostatic model; mechanical model; micro-electro-mechanical cantilever switch; toggle switch; Analytical models; Contacts; Electrodes; Electrostatics; Micromechanical devices; Radio frequency; Springs; Stress; Switches; Voltage;
Conference_Titel :
Silicon Monolithic Integrated Circuits in RF Systems, 2003. Digest of Papers. 2003 Topical Meeting on
Conference_Location :
Grainau, Germany
Print_ISBN :
0-7803-7787-7
DOI :
10.1109/SMIC.2003.1196703
