Title :
A micro-sized CNT paste-emitter for nano-focus X-ray sources
Author :
Jeongyong Choi ; Jin-Woo Jeong ; Jun-Tae Kang ; Sungyoul Choi ; Jae-Woo Kim ; Seungjoon Ahn ; Yoon-Ho Song
Author_Institution :
Nano Electron-Source Creative Res. Center, ETRI, Daejeon, South Korea
Abstract :
A CNT field emitter is suitable to keep the nano-sized focal spot of electron beam for the high-quality images by an x-ray source in nano inspection systems. The micro-sized CNT emitter of an around 10 μm in diameter was formed by the optimized CNT paste through the simple ball-milling process, showing a high current density of 124 A/cm2 at an anode voltage of 4.95 kV. We designed the focal spot of 200~300 nm from the CNT emitter with a diameter of 10 μm and a tube length of 30 mm using the electrostatic and magnetic lenses.
Keywords :
X-ray imaging; ball milling; carbon nanotubes; field emission; ball-milling process; electron beam; electrostatic; magnetic lenses; micro-sized CNT field emitter; nanofocus X-ray source; nanoinspection systems; nanosized focal spot; size 10 mum; size 200 nm to 300 nm; size 30 mm; voltage 4.95 kV; Electron tubes; Inspection; Magnetic properties; Magnetic resonance imaging; Three-dimensional displays; CNT; CNT emitter; Field emission; nano focal spot; x-ray source;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2013 26th International
Conference_Location :
Roanoke, VA
DOI :
10.1109/IVNC.2013.6624757
