Title :
12 GHz coplanar quasi-monolithic oscillator
Author :
Wasige, E. ; Kompa, G. ; van Raay, F. ; Scholz, W. ; Rangelow, I.W. ; Kassing, R. ; Bertram, S. ; Hudek, P.
Author_Institution :
FG Hochfrequenztech., Kassel Univ., Germany
Abstract :
First results on coplanar quasi-monolithic (QM) circuits with GaAs FETs embedded in a silicon substrate are presented. Typical monolithic integration techniques are used for the fabrication of the passive circuitry and interconnects to the active devices. Measurements on a 12 GHz oscillator demonstrate the viability of the proposed technology.
Keywords :
hybrid integrated circuits; microwave integrated circuits; microwave oscillators; 12 GHz; GaAs; GaAs FETs; Si; Si substrate; active devices; coplanar quasi-monolithic oscillator; interconnects; monolithic integration techniques; passive circuitry; quasi-monolithic circuits; FETs; Fabrication; Gallium arsenide; Integrated circuit interconnections; Integrated circuit measurements; MMICs; Microwave Theory and Techniques Society; Microwave oscillators; Silicon; Substrates;
Conference_Titel :
Microwave Symposium Digest, 1999 IEEE MTT-S International
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
0-7803-5135-5
DOI :
10.1109/MWSYM.1999.779463
