A novel structure of a piezoresistive accelerometer with lateral detection using precise fabrication techniques

A new type of accelerometer using precise fabrication techniques has been developed. The accelerometer is fabricated on a piezoresistive element with other necessary circuits and runs parallel to the direction of acceleration. The surface width of the fabricated circuit is a few hundred microns thick. The device uses lateral detection to obtain good sensitivity and has achieved sufficient performance in terms of chip miniaturization. The built-in amplifier has been successfully fabricated with a narrow width, and confirmed operation. This is a new approach for making an accelerometer and has a large potential for manufacturing an effective accelerometer.