Binding force measurement between micro-scale flat surfaces in aqueous environment by force-sensing piezoresistive micro-cantilevers

This paper describes binding force measurement using force sensing piezoresistive cantilevers, to evaluate binding between micro scale SiO₂ flat surfaces in an HCl solution for fluidic micro-self-assembly. We measured binding force between a cylindrical microparticle and a substrate by pushing the particle with the cantilever. We successfully measured the binding force in nano-newton order caused by van der Waals´ interaction, and revealed that the phenomenon observed in colloid particles occurred similarly in micro scale flat surfaces.