Title :
Thin film magnetostrictive sensor with on-chip readout and attoFarad capacitance resolution
Author :
Lu, Y. ; Nathan, A. ; Manku, T. ; Ning, Y.
Author_Institution :
Dept. of Electr. & Comput. Eng., Waterloo Univ., Ont., Canada
Abstract :
We report the first successful integration of magnetostrictive Metglas (Fe/sub 78/Si/sub 9/B/sub 13/) thin film sensor with a readout circuit using standard integrated circuit (IC) process and surface micromachining. The Metglas thin film is on a nitride cantilever beam. Its magnetic domains are subject to rotation in a magnetic field. This induces a strain and hence, beam deflection which is measured through capacitive change using a charge coupling readout scheme with aF capacitance resolution.
Keywords :
amorphous magnetic materials; capacitance measurement; magnetic domains; magnetic sensors; magnetic thin film devices; magnetostrictive devices; metallic glasses; micromachining; microsensors; Fe/sub 78/Si/sub 9/B/sub 13/; Metglas; attofarad capacitance resolution; beam deflection; charge coupling; integrated circuit process; magnetic domains; nitride cantilever beam; on-chip readout; strain; surface micromachining; thin film magnetostrictive sensor; Amorphous magnetic materials; Capacitance; Capacitive sensors; Magnetic domains; Magnetic field induced strain; Magnetic field measurement; Magnetic sensors; Magnetostriction; Thin film circuits; Thin film sensors;
Conference_Titel :
Electron Devices Meeting, 1996. IEDM '96., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-3393-4
DOI :
10.1109/IEDM.1996.554095
