Title :
CMOS-MEMS resonant RF mixer-filters
Author :
Chen, Fang ; Brotz, Jay ; Arslan, Umut ; Lo, Chiung-Cheng ; Mukherjee, Tamal ; Fedder, Gary K.
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
fDate :
30 Jan.-3 Feb. 2005
Abstract :
An integrated CMOS-MEMS micromechanical resonant mixer-filter with potential for application in a single chip receiver is introduced. Air and anchor damping characterization show quality factor greater than 1500. Downconversion and filtering of signal frequencies as high as 3.2 GHz is achieved. This is the highest signal frequency applied so far to MEMS mixer-filters. Analytical calculations match well with the experimental measurements and are used to show that 0 dB mixer conversion loss is achievable. Co-simulation of the MEMS mixer with readout electronics identifies potential solutions to eliminate mixing feedthrough.
Keywords :
CMOS analogue integrated circuits; micromechanical resonators; microwave filters; microwave mixers; radio receivers; radiofrequency integrated circuits; resonator filters; 3.2 GHz; CMOS-MEMS mixer-filter; air damping; anchor damping; micromechanical resonant mixer-filter; mixer conversion loss; mixing feedthrough; quality factor; signal frequency; single chip receiver; Damping; Filtering; Loss measurement; Micromechanical devices; Mixers; Q factor; Radio frequency; Readout electronics; Resonance; Semiconductor device measurement;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453858
