Intelligent differential pressure transmitter using micro-resonators

The authors describe a resonant Si pressure sensor fabricated using three-dimensional micromachining techniques, and an intelligent differential pressure transmitter incorporating this sensor. Using resonant pressure sensors fabricated from single-crystal Si is shown to result in excellent uniformity, repeatability, resolution, and stability; the effect of environmental temperature and pressure changes is one tenth that of conventional units. The authors describe the principles and fabrication of the Si resonant sensors, and the principles and characteristics of the intelligent differential pressure transmitters which use them