Title :
A MEMS array for pneumatic conveyor and its control based on distributed system
Author :
Fukuta, Y. ; Chapuis, X.A. ; Mita, Y. ; Fujita, H.
Author_Institution :
IIS, Tokyo Univ., Japan
fDate :
30 Jan.-3 Feb. 2005
Abstract :
In this paper, a pneumatic conveyor and its control mode are proposed for tiny object manipulation. The conveyor consists of a 2D array of 560 air-nozzle actuators realized by the silicon MEMS technology. A distributed control method, based on local air-flow force application, has been developed and successfully validated. Experimental and characterization results are finally presented and analyzed.
Keywords :
conveyors; distributed control; microactuators; pneumatic actuators; 2D array; MEMS array; air-flow force application; air-nozzle actuators; control mode; distributed control system; pneumatic conveyor; silicon MEMS technology; tiny object manipulation; Control systems; Distributed control; Electrostatics; Force control; Microactuators; Micromechanical devices; Pneumatic actuators; Sensorless control; Silicon; Valves;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453862
