Acoustic differential amplifier based on acoustic FET

Author

Tanaka, Mitsuru ; Sakashita, Takayashi ; Konishi, Sutoshi

Author_Institution

Graduate Sch. of Sci. & Eng., Ritsumeikan Univ., Kyoto, Japan

fYear

2005

fDate

30 Jan.-3 Feb. 2005

Firstpage

44

Lastpage

47

Abstract

We have studied acoustic systems composed of MEMS-based acoustic components from the aspect of an analogy with electronic circuits. An acoustic FET has been presented as an active acoustic component based on MEMS technology. This paper deals with the acoustic differential amplifier as one of typical circuits of the FET in order to demonstrate active acoustic circuits. The acoustic differential amplifier is composed of MEMS-based acoustic FETs. The acoustic differential amplifier is presented to explore further development of active acoustic systems composed of MEMS-based acoustic components while the electronic differential amplifier is the principal circuit toward the operational amplifier. A pair of acoustic FETs with polyimide membrane on Si structure is fabricated. Design, fabrication, and characteristics of the acoustic differential amplifier is reported in this paper.

Keywords

MOSFET; differential amplifiers; micromechanical devices; operational amplifiers; silicon; MEMS technology; MEMS-based acoustic components; Si; Si structure; acoustic FET; acoustic differential amplifier; acoustic systems; active acoustic circuits; electronic circuits; electronic differential amplifier; operational amplifier; polyimide membrane; Acoustical engineering; Analog integrated circuits; Differential amplifiers; Educational institutions; Electronic circuits; FETs; Fabrication; Micromechanical devices; Noise reduction; Operational amplifiers;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-8732-5

Type

conf

DOI

10.1109/MEMSYS.2005.1453863

Filename

1453863