Development of small-sized 3 DOF finger module in micro hand for micro manipulation

A dexterous micro manipulation system was developed for applications such as assembling micro machines, manipulating cells, and micro surgery. We have proposed a concept of a two-fingered microhand, and designed and built a prototype. We succeeded in performing basic micro manipulations, including the grasp, release, and rotation of a microscopic object. The two-fingered micro hand prototype should be more miniaturized for higher accuracy and combination in small chamber of SEM. In this paper, we will propose a small-sized 3-DOF finger module with a parallel mechanism. An optimized link mechanism for miniaturization is used to the finger module. A photo fabrication system is used to fabrication of the finger module. Basic experiment shows excellent micro capability