A tunable microlens scanner with large-vertical-displacement actuation

Author

Jain, Ankur ; Huikai Xie

Author_Institution

Dept. of Electr. & Comput. Eng., Florida Univ., Gainesville, FL, USA

fYear

2005

fDate

30 Jan.-3 Feb. 2005

Firstpage

92

Lastpage

95

Abstract

We report the design, fabrication and operation of a tunable microlens that can perform large vertical scans at low actuation voltages. Photoresist reflow technique was used to form a 210 μm diameter microlens on a lens holder that is integrated with a large-vertical-displacement (LVD) microactuator. The lens holder is fabricated using a unique DRIE CMOS-MEMS process. A maximum vertical displacement of 280 μm is achieved with a 700 μm-by-320 μm LVD device at an actuation voltage of 10 V. The microlens has a focal length of 188 μm, a numerical aperture of 0.35, and a resonant frequency of about 1 kHz.

Keywords

microlenses; optical fabrication; optical scanners; optical tuning; 10 V; DRIE CMOS-MEMS process; LVD microactuator; actuation voltages; large-vertical-displacement actuation; photoresist reflow; tunable microlens scanner; Actuators; Biomedical optical imaging; Etching; Lenses; Low voltage; Microoptics; Optical beams; Optical imaging; Optical microscopy; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-8732-5

Type

conf

DOI

10.1109/MEMSYS.2005.1453875

Filename

1453875