Title :
Integrated readout and drive circuits for a microelectromechanical gyroscope
Author :
Tao Yin ; Huanming Wu ; Haigang Yang ; Qisong Wu ; Jiwei Jiao
Author_Institution :
Inst. of Electron., Beijing, China
fDate :
Oct. 29 2012-Nov. 1 2012
Abstract :
An ASIC is implemented for readout and drive of a bulk micromachined gyroscope utilizing electromagnetic actuation and sensing. A fully differential structure is used in the readout channel and drive loop to reduce the common-mode noise and interference. A low-noise front-end amplifier is designed to sense the rotation induced voltage signal. A switched-capacitor BPF with adjustable center frequency is proposed to track the resonance frequency and suppress the noise and harmonic components out of the signal bands. An AGC-based driving loop with PLL for demodulation clock generation is also designed and integrated on chip. The interface circuits are designed in a 0.35μm 2P4M CMOS process. The simulation results show that the readout circuit achieves an input referred noise voltage of 16.5nV/√Hz and dynamic range of 80dB over the 100Hz bandwidth from a single 5V supply.
Keywords :
application specific integrated circuits; driver circuits; gyroscopes; low noise amplifiers; microsensors; phase locked loops; readout electronics; 2P4M CMOS; AGC-based driving loop; ASIC; PLL; adjustable center frequency; common-mode noise; demodulation clock generation; drive circuits; drive loop; electromagnetic actuation; electromagnetic sensing; frequency 100 Hz; integrated readout circuits; low-noise front-end amplifier; microelectromechanical gyroscope; readout channel; switched-capacitor BPF; voltage 5 V; wavelength 0.35 mum; Band pass filters; Gyroscopes; Low pass filters; Micromechanical devices; Noise; Resonant frequency; Sensors;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2012 IEEE 11th International Conference on
Conference_Location :
Xi´an
Print_ISBN :
978-1-4673-2474-8
DOI :
10.1109/ICSICT.2012.6467874
