DocumentCode
3421315
Title
Radio frequency power sensor based on MEMS technology with ultra low loss
Author
Fernández, Luis ; Sesé, Javier ; Wiegerink, Remco ; Flokstra, Jaap ; Jansen, Henri ; Elwenspoek, Miko
Author_Institution
MESA+ Inst., Twente Univ., Enschede, Netherlands
fYear
2005
fDate
30 Jan.-3 Feb. 2005
Firstpage
191
Lastpage
194
Abstract
A wideband 100 kHz-4 GHz power sensor, of which the basic design was presented recently by L. J. Fernandez et al. (2004), was successfully realized. The sensor is based on sensing the electrical force between the RF signal line and a suspended membrane. Optimization of the design with SONNET has resulted in measured reflection losses (S11) less than -30 dB, transmission losses (SI2) better than -0.2 dB, and a sensitivity of 80 aF/mW.
Keywords
UHF measurement; microsensors; microwave measurement; power measurement; 100 to 4E6 KHz; MEMS technology; RF signal line; SONNET; design optimization; electrical force sensing; radio frequency power sensor; reflection losses; suspended membrane; transmission losses; ultra low loss; Biomembranes; Capacitors; Coplanar waveguides; Electrodes; Force sensors; Loss measurement; Micromechanical devices; Power measurement; Propagation losses; Radio frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
ISSN
1084-6999
Print_ISBN
0-7803-8732-5
Type
conf
DOI
10.1109/MEMSYS.2005.1453899
Filename
1453899
Link To Document