Title :
Radio frequency power sensor based on MEMS technology with ultra low loss
Author :
Fernández, Luis ; Sesé, Javier ; Wiegerink, Remco ; Flokstra, Jaap ; Jansen, Henri ; Elwenspoek, Miko
Author_Institution :
MESA+ Inst., Twente Univ., Enschede, Netherlands
fDate :
30 Jan.-3 Feb. 2005
Abstract :
A wideband 100 kHz-4 GHz power sensor, of which the basic design was presented recently by L. J. Fernandez et al. (2004), was successfully realized. The sensor is based on sensing the electrical force between the RF signal line and a suspended membrane. Optimization of the design with SONNET has resulted in measured reflection losses (S11) less than -30 dB, transmission losses (SI2) better than -0.2 dB, and a sensitivity of 80 aF/mW.
Keywords :
UHF measurement; microsensors; microwave measurement; power measurement; 100 to 4E6 KHz; MEMS technology; RF signal line; SONNET; design optimization; electrical force sensing; radio frequency power sensor; reflection losses; suspended membrane; transmission losses; ultra low loss; Biomembranes; Capacitors; Coplanar waveguides; Electrodes; Force sensors; Loss measurement; Micromechanical devices; Power measurement; Propagation losses; Radio frequency;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453899
