Title :
Remote-powered high-performance strain sensing microsystem
Author :
Suster, Michael ; Chaimanonart, Nattapon ; Guo, Jun ; Ko, Wen H. ; Young, Darrin J.
Author_Institution :
Dept. of EECS, Case Western Reserve Univ., Cleveland, OH, USA
fDate :
30 Jan.-3 Feb. 2005
Abstract :
This paper presents an RF remote-powered high-performance strain sensing microsystem. A MEMS capacitive strain sensor converts an input strain to a capacitance change, followed by low-noise integrated sensing electronics converting the capacitive signal to an output voltage with an overall sensitivity of 420 μV/με. An RF to DC converter based on inductive coupled coils converts a 50 MHz AC signal to a stable DC supply of 2.8 V with a current driving capability of 2 mA, sufficient to power the interface sensing electronics. The prototype microsystem achieves a minimum detectable strain of 0.09 HE over a 10 kHz bandwidth with a dynamic range of 81 dB. The sensing electronics consume 1.5 mA from a 2.8 V supply.
Keywords :
microsensors; power convertors; strain sensors; 1.5 mA; 10 kHz; 2 mA; 2.8 V; 50 MHz; MEMS; RF-to-DC converter; capacitive strain sensor; high-performance strain sensing; inductive coupled coils; interface sensing electronics; low-noise integrated sensing electronics; remote-powered strain sensing; Capacitance; Capacitive sensors; Coils; DC-DC power converters; Helium; Micromechanical devices; Prototypes; RF signals; Radio frequency; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453915
