A novel MEMS device for high resolution force and displacement measurement

We present the design and fabrication of a MEMS device for high resolution force and displacement measurements. Quantitative and qualitative measurements can be performed in-situ in SEM, TEM or STM, where the small chamber size makes it challenging to integrate conventional force-displacement sensors. The device exploits the amplification of displacement and attenuation of structural stiffness in the post-buckling region of slender silicon beams to obtain pico-Newton force and nanometer displacement resolution. The specimen deformation can be read in optical microscopes, thus avoiding complex displacement sensing mechanisms. The device can be used for characterization of carbon nanotube-polymer interfaces, nanoscale thin films and mechanical testing of single biological cells.