DocumentCode
3421952
Title
A monolithic integrated array of out-of-plane hot-wire flow sensors and demonstration of boundary-layer flow imaging
Author
Chen, Jack ; Engel, Jonathan ; Chen, Nannan ; Liu, Chann
Author_Institution
Micro & Nanotechnology Lab., Illinois Urbana-Champaign Univ., IL, USA
fYear
2005
fDate
30 Jan.-3 Feb. 2005
Firstpage
299
Lastpage
302
Abstract
We report the development of an out of plane hot wire flow sensor array fabricated using robust three dimensional assembly. The sensor is monolithically integrated with a commercial JFET operational amplifier and operates in constant temperature mode. Output response to airflow has been measured and we have applied the hot wire anemometer array for flow imaging.
Keywords
anemometers; boundary layer turbulence; flow measurement; operational amplifiers; 3D assembly; JFET operational amplifier; airflow; boundary layer flow imaging; constant temperature mode; hot wire anemometer array; monolithic integrated array; out-of-plane hot wire flow sensors; Assembly; Bridge circuits; Fluid flow measurement; Image sensors; Loss measurement; Micromachining; Sensor arrays; Silicon; Temperature sensors; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
ISSN
1084-6999
Print_ISBN
0-7803-8732-5
Type
conf
DOI
10.1109/MEMSYS.2005.1453926
Filename
1453926
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