Title :
Fish and chips: single chip silicon MEMS CTDL salinity, temperature, pressure and light sensor for use in fisheries research
Author :
Hyldgard, A. ; Hansen, O. ; Thomsen, E.V.
Author_Institution :
Dept. of Micro & Nanotechnol., Tech. Univ. of Denmark, Lyngby, Denmark
fDate :
30 Jan.-3 Feb. 2005
Abstract :
A single-chip silicon MEMS CTDL multi sensor for use in aqueous environments is presented. The new sensor chip consists of a conductivity sensor based on platinum electrodes (C), an ion-implanted thermistor temperature sensor (T), a piezoresistive pressure sensor (D for depth/pressure) and an ion-implanted p-n junction light sensor (L). The design and fabrication process is described. A temperature sensitivity of 0.8 × 10-3K-1 has been measured and detailed analysis of conductivity measurement data shows a cell constant of 81 cm-1.
Keywords :
aquaculture; electrical conductivity measurement; microprocessor chips; microsensors; p-n junctions; piezoresistive devices; pressure sensors; temperature sensors; thermistors; CTDL salinity sensor; MEMS; Si; aqueous environments; conductivity measurement; conductivity sensor; fisheries research; ion-implanted thermistor; light sensor; multisensor; p-n junction; piezoresistive pressure sensor; platinum electrodes; pressure sensor; single chip silicon; temperature sensor; Aquaculture; Conductivity measurement; Electrodes; Marine animals; Micromechanical devices; Platinum; Silicon; Temperature sensors; Thermal sensors; Thermistors;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453927
