Spiral-tube parylene intraocular pressure sensor

Author

Chen, Po-Jui ; Rodger, Damien ; Tai, Yu-Chong ; Humayun, Mark

Author_Institution

California Inst. of Technol., Pasadena, CA, USA

fYear

2005

fDate

30 Jan.-3 Feb. 2005

Firstpage

311

Lastpage

314

Abstract

This paper presents the first biocompatible, all-mechanical, micromachined pressure sensor with a high-aspect-ratio spiral-tube structure fabricated through a one-layer parylene process. This passive sensor has zero power consumption and indicates the pressure variation by changes of in situ in-plane spiral rotation, which can be gauged externally by a direct and convenient optical observation. A 1 mm-radius device with a 10-turn spiral has demonstrated a 0.22 degree/mmHg sensitivity in liquid. This device is designed for eye implantation and the intraocular spiral rotation can be recorded from outside of the eye. Such a sensing technology is proposed to monitor the intraocular pressure in glaucoma patients.

Keywords

micromechanical devices; patient monitoring; pressure sensors; prosthetics; 1 mm; all-mechanical pressure sensor; biocompatible pressure sensor; eye implantation; glaucoma patients; intraocular pressure sensor; intraocular spiral rotation; micromachined pressure sensor; optical observation; parylene process; passive sensor; pressure variation; sensing technology; spiral-tube structure; zero power consumption; Biomedical optical imaging; Biosensors; Diseases; Energy consumption; Medical treatment; Optical recording; Optical sensors; Patient monitoring; Shape; Spirals;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-8732-5

Type

conf

DOI

10.1109/MEMSYS.2005.1453929

Filename

1453929