Title :
Proceedings of Ninth International Workshop on Micro Electromechanical Systems
Abstract :
The following topics were dealt with: electrostatic actuators; fabrication; tribology and mechanical properties; design and modeling; physical sensors; accelerometers; applications
Keywords :
accelerometers; electrostatic devices; microactuators; micromachining; micromechanical devices; microsensors; semiconductor device models; semiconductor technology; tribology; MEMS; accelerometers; applications; design; electrostatic actuators; fabrication; mechanical properties; microelectromechanical systems; modeling; physical sensors; tribology;
Conference_Titel :
Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-2985-6
DOI :
10.1109/MEMSYS.1996.493818
