DocumentCode
3422219
Title
Author index
fYear
1996
fDate
11-15 Feb. 1996
Abstract
The author index contains an entry for each author and coauthor included in the proceedings record.
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on
Conference_Location
San Diego, CA, USA
Print_ISBN
0-7803-2985-6
Type
conf
DOI
10.1109/MEMSYS.1996.493819
Filename
493819
Link To Document