Vacuum packaged low noise gyroscope with sub mdeg/s/√Hz resolution

This paper describes a vacuum packaged z-axis gyroscope with sub milli-deg/s/√Hz noise floor. A design rule for the low noise gyroscope is suggested, and lateral vibrating gyroscope was fabricated through a metal interlaid SiOG technology. High aspect ratio (20:1) silicon structures were fabricated without footing damage. The easy method for the electric connection of feed through holes that are 150 μm in diameter is suggested for vacuum package of SiOG structure. The vacuum packaged gyroscope with a quality factor of 10,000 exhibits a noise floor of 0.4 mdeg/s/√Hz, and a bias stability of 4.7 mdeg/s (=17 deg/hour), where the scale factor is 68.5 mV/deg/s with 0.6% linearity error for the range of 200 deg/s.