Title :
Design and fabrication of a microfluid angular rate sensor
Author :
Zhou, Jian ; Yan, Guizhen ; Zhu, Yong ; Xiao, Zhyong ; Fan, Jie
fDate :
30 Jan.-3 Feb. 2005
Keywords :
Automotive engineering; Cameras; Costs; Fabrication; Inertial navigation; Micromechanical devices; Robot sensing systems; Robot vision systems; Solids; Tail;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453942
