Title :
A 1.5 V supplied, CMOS ASIC for the actuation of an electrostatic micromotor
Author :
Favrat ; Paratte, L. ; Ballan ; Declercq, Michel ; De Rooij
Author_Institution :
Electron. Lab., Swiss Federal Inst. of Technol., Lausanne, Switzerland
Abstract :
The use of electrostatic forces in micromechanical systems is well known but needs quite high voltages to produce usable forces. In this perspective paper, we present an autonomous, nonresonant, open-loop, 1.5 V battery-supplied high voltage integrated circuit able to drive an electrostatic micromotor, for opening the way to future portable applications (wristwatch like)
Keywords :
CMOS digital integrated circuits; application specific integrated circuits; driver circuits; electrostatic devices; invertors; micromotors; performance evaluation; power supplies to apparatus; resonant power convertors; 1.5 V; ASIC; CMOS ASIC; actuation; autonomous nonresonant high voltage integrated circuit; current level shifter; drive; electrostatic micromotor; micromechanical systems; open-loop battery-supplied HV IC; portable applications; speed measurement; static level shifter; wristwatch; Application specific integrated circuits; Batteries; CMOS logic circuits; CMOS technology; Electrostatics; Laboratories; Micromotors; Rotors; Stators; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-2985-6
DOI :
10.1109/MEMSYS.1996.493824
