A 1.5 V supplied, CMOS ASIC for the actuation of an electrostatic micromotor

Author

Favrat ; Paratte, L. ; Ballan ; Declercq, Michel ; De Rooij

Author_Institution

Electron. Lab., Swiss Federal Inst. of Technol., Lausanne, Switzerland

fYear

1996

fDate

11-15 Feb 1996

Firstpage

25

Lastpage

31

Abstract

The use of electrostatic forces in micromechanical systems is well known but needs quite high voltages to produce usable forces. In this perspective paper, we present an autonomous, nonresonant, open-loop, 1.5 V battery-supplied high voltage integrated circuit able to drive an electrostatic micromotor, for opening the way to future portable applications (wristwatch like)

Keywords

CMOS digital integrated circuits; application specific integrated circuits; driver circuits; electrostatic devices; invertors; micromotors; performance evaluation; power supplies to apparatus; resonant power convertors; 1.5 V; ASIC; CMOS ASIC; actuation; autonomous nonresonant high voltage integrated circuit; current level shifter; drive; electrostatic micromotor; micromechanical systems; open-loop battery-supplied HV IC; portable applications; speed measurement; static level shifter; wristwatch; Application specific integrated circuits; Batteries; CMOS logic circuits; CMOS technology; Electrostatics; Laboratories; Micromotors; Rotors; Stators; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on

Conference_Location

San Diego, CA

Print_ISBN

0-7803-2985-6

Type

conf

DOI

10.1109/MEMSYS.1996.493824

Filename

493824