Title :
MEMS flextensional actuator using lead zirconate titanate thin film
Author :
Yu, H.G. ; Tadigadapa, S. ; Trolier-McKinstry, S. Trolier
Author_Institution :
Dept. of Electr. Eng., Pennsylvania State Univ., University Park, PA, USA
fDate :
30 Jan.-3 Feb. 2005
Abstract :
Piezoelectric flextensional microactuators have been designed and fabricated using silicon micromachining techniques. A lead zirconate titanate (PZT) thin film is used as the piezoelectric actuator material. A fabrication process using five photolithography steps and a final release step has been developed. Static displacement of the actuators was measured using a white light interference microscope. Displacements in the range of 2.3-12.7 μm at 200 kV/cm for actuators with four different lengths were measured. From these measurements an amplification factor of 1.5 compared to unimorph actuator was deduced. Corresponding resonance frequencies in the range of 407-32.6 kHz were obtained using an Agilent 4294A impedance analyzer in a vacuum ambient of 5×10-4 mbar.
Keywords :
lead compounds; microactuators; micromachining; photolithography; piezoelectric actuators; piezoelectric thin films; Agilent 4294A impedance analyzer; MEMS flextensional actuator; PZT; PZT thin film; PbZrO3TiO3; amplification factor; lead zirconate titanate thin film; photolithography; piezoelectric actuator material; piezoelectric flextensional microactuators; resonance frequencies; silicon micromachining techniques; static displacement measurement; Displacement measurement; Microactuators; Micromachining; Micromechanical devices; Piezoelectric actuators; Piezoelectric films; Piezoelectric materials; Silicon; Titanium compounds; Transistors;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453945
