Bidirectional electrostatic linear shuffle motor with two degrees of freedom

Author

Sarajlic, E. ; Berenschot, E. ; Fujita, H. ; Krijnen, G. ; Elwenspoek, M.

fYear

2005

fDate

30 Jan.-3 Feb. 2005

Firstpage

391

Lastpage

394

Keywords

Clamps; Electrostatics; Energy consumption; Fabrication; Legged locomotion; Micromachining; Micromotors; Probes; Silicon; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-8732-5

Type

DOI

10.1109/MEMSYS.2005.1453949

Filename

1453949

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