Title :
Linear micromotors and spatial micromechanisms based on UV-LIGA
Author :
Cheng, W.-J. ; DeVoe, D.L.
fDate :
30 Jan.-3 Feb. 2005
Keywords :
Bidirectional control; Bonding; Clamps; Educational institutions; Electrothermal effects; End effectors; Fabrication; Hydraulic actuators; Mechanical engineering; Micromotors;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453951