DocumentCode :
3422526
Title :
Linear micromotors and spatial micromechanisms based on UV-LIGA
Author :
Cheng, W.-J. ; DeVoe, D.L.
fYear :
2005
fDate :
30 Jan.-3 Feb. 2005
Firstpage :
399
Lastpage :
402
Keywords :
Bidirectional control; Bonding; Clamps; Educational institutions; Electrothermal effects; End effectors; Fabrication; Hydraulic actuators; Mechanical engineering; Micromotors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
ISSN :
1084-6999
Print_ISBN :
0-7803-8732-5
Type :
conf
DOI :
10.1109/MEMSYS.2005.1453951
Filename :
1453951
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3422526
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