Electroplated thick CoNiMnP permanent magnet arrays for micromachined magnetic device applications

Author

Linkopoulos, T.M. ; Zhang, Wenjin ; Ahn, Chong H.

Author_Institution

Dept. of Electr. & Comput. Eng., Cincinnati Univ., OH, USA

fYear

1996

fDate

11-15 Feb 1996

Firstpage

79

Lastpage

84

Abstract

Electroplated thick CoNiMnP permanent magnet arrays for micromachined magnetic device applications have been designed, fabricated, and tested. The electroplated arrays contain 5000 magnets of 40 μm×40 μm×50 μm in a cubic shape on the silicon membrane of 4.6 mm×4.6 mm ×20 μm, where the magnets have shown a fairly high magnetic vertical coercivity of 600 Oe, a retentivity of 0.2-0.3 Teslas, and a maximum energy density of 10 kJ/m ³. Using the electroplated magnet array, a proto-type bi-directional vertical microactuator on silicon membrane has been realized with integrated spiral coils. The magnet arrays realized in this work allow a low power consumption, a flexible bi-directional actuation, as well as a favorable CMOS compatibility

Keywords

CMOS integrated circuits; arrays; cobalt alloys; electroplated coatings; elemental semiconductors; manganese alloys; microactuators; micromachining; nickel alloys; permanent magnets; phosphorus alloys; semiconductor technology; silicon; 0.2 tesla to 0.3 T; 20 mum; 4.6 mm; 40 mum; 50 mum; CMOS compatibility; CoNiMnP; CoNiMnP permanent magnet arrays; Si; Si membrane; bi-directional actuation; electroplated permanent magnet arrays; energy density; integrated spiral coils; magnetic vertical coercivity; micromachined magnetic device; proto-type bi-directional vertical microactuator; retentivity; Bidirectional control; Biomembranes; Coercive force; Magnetic devices; Microactuators; Permanent magnets; Shape; Silicon; Spirals; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on

Conference_Location

San Diego, CA

Print_ISBN

0-7803-2985-6

Type

conf

DOI

10.1109/MEMSYS.1996.493833

Filename

493833