A passive micro gas regulator for hydrogen flow control

Author

Debray, A. ; Nakakubo, T. ; Ueda, K. ; Mogi, S. ; Shibata, M. ; Fujita, Hideaki

fYear

2005

fDate

30 Jan.-3 Feb. 2005

Firstpage

419

Lastpage

422

Keywords

Fuel cells; Home appliances; Hydrogen; Micromechanical devices; Portable computers; Regulators; Silicon; Valves; Water heating; Water pollution;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-8732-5

Type

DOI

10.1109/MEMSYS.2005.1453956

Filename

1453956

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