Title :
A surface-micromachined shear stress imager
Author :
Jiang, Fukang ; Tai, Yu-Chong ; Gupta, Bhusan ; Goodman, Rodney ; Tung, Steve ; Huang, Jin-Biao ; Ho, Chih-Ming
Author_Institution :
Dept. of Electr. Eng., California Inst. of Technol., Pasadena, CA, USA
Abstract :
A new MEMS shear stress sensor imager has been developed and its capability of imaging surface shear stress distribution has been demonstrated. The imager consists of multi-rows of vacuum-insulated shear stress sensors with a 300 μm pitch. This small spacing allows it to detect surface flow patterns that could not be directly measured before. The high frequency response (30 kHz) of the sensor under constant temperature bias mode also allows it to be used in high Reynolds number turbulent flow studies. The measurement results in a fully developed turbulent flow agree well with the numerical and experimental results previously published
Keywords :
elemental semiconductors; flow visualisation; image sensors; microsensors; shear strength; shear turbulence; silicon; stress measurement; vortices; 30 kHz; 300 mum; MEMS; Reynolds number; Si; high frequency response; multi-rows; skin friction; surface-micromachined shear stress imager; turbulent flow; vacuum-insulated shear stress sensors; vortices; Drag; Fluid flow measurement; Friction; Image sensors; Micromechanical devices; Skin; Substrates; Temperature sensors; Thermal conductivity; Thermal stresses;
Conference_Titel :
Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-2985-6
DOI :
10.1109/MEMSYS.1996.493838
