Title :
Nano contact formation in a simple mems device for the conductance measurements of nano objects
Author :
Gel, M. ; Ishida, Shigesuke ; Iwamoto, Satoshi ; Arakawa, Yasuhiko ; Fujita, H.
fDate :
30 Jan.-3 Feb. 2005
Keywords :
Electron beams; Fabrication; Gold; Image coding; Lithography; Microelectromechanical devices; Resists; Size control; Wet etching; Wires;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453959
