Nano contact formation in a simple mems device for the conductance measurements of nano objects

Author

Gel, M. ; Ishida, Shigesuke ; Iwamoto, Satoshi ; Arakawa, Yasuhiko ; Fujita, H.

fYear

2005

fDate

30 Jan.-3 Feb. 2005

Firstpage

431

Lastpage

434

Keywords

Electron beams; Fabrication; Gold; Image coding; Lithography; Microelectromechanical devices; Resists; Size control; Wet etching; Wires;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-8732-5

Type

DOI

10.1109/MEMSYS.2005.1453959

Filename

1453959

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