Title :
Development of adhesive contact of MEMS-switches upon actuation cycling
Author :
Gregori, Gianluca ; Mihailovich, R.E. ; DeNatale, J.F. ; Clarke, D.R.
Author_Institution :
Dept. of Mater., California Univ., Santa Barbara, CA, USA
fDate :
30 Jan.-3 Feb. 2005
Abstract :
MEMS switches are prone to adhesive failure upon actuation cycling. In this contribution, we present direct measurements of the adhesive contact forces and how they increase with cycling. These are correlated with microstructural changes in the contacts themselves and complementary changes in the electrical characteristics are reported.
Keywords :
adhesion; electrical contacts; failure (mechanical); microswitches; MEMS switches; actuation cycling; adhesive contact force measurement; adhesive failure; electrical characteristics; microstructural changes; Bridge circuits; Contacts; Electric variables; Force measurement; Micromechanical devices; Microswitches; Performance evaluation; Switches; Testing; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453961
