DocumentCode :
3422800
Title :
Pull-in curves determined with monolithic FEM models
Author :
Hannot, Stephan D A ; Rixen, Daniel J.
Author_Institution :
Delft Univ. of Technol., Delft
fYear :
2009
fDate :
26-29 April 2009
Firstpage :
1
Lastpage :
8
Abstract :
This paper gives an overview of the different monolithic approaches to compute the pull-in curve for discretized models of electrostatically actuated microsystems that are currently available in the literature. A method to implement monolithic charge loading combined with path-following is proposed. The performance of the algorithms is tested with some numerical experiments: FEM models of microbeams, used to model micro-switches. The results show that the charge loading scheme provides a fast converging alternative to the traditional path-following approaches. Finally it is shown that the algorithm can be easily extended to handle bifurcations.
Keywords :
finite element analysis; microswitches; electrostatically actuated microsystems; micro-switches; monolithic FEM models; monolithic charge loading; path-following; pull-in curves; Electrodes; Electrostatics; Laplace equations; Magnetic heads; Micromechanical devices; Numerical models; Partial differential equations; Sensor systems; Testing; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Thermal, Mechanical and Multi-Physics simulation and Experiments in Microelectronics and Microsystems, 2009. EuroSimE 2009. 10th International Conference on
Conference_Location :
Delft
Print_ISBN :
978-1-4244-4160-0
Electronic_ISBN :
978-1-4244-4161-7
Type :
conf
DOI :
10.1109/ESIME.2009.4938406
Filename :
4938406
Link To Document :
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