3D modeling of contact problems and hysteresis in coupled electro-mechanics

Author

Gilbert, J.R. ; Ananthasuresh, G.K. ; Senturia, S.D.

Author_Institution

Microsystems Technol. Lab., MIT, Cambridge, MA, USA

fYear

1996

fDate

11-15 Feb 1996

Firstpage

127

Lastpage

132

Abstract

This paper discusses the modeling of electromechanical hysteresis in devices which exhibit contact between components. We make use of a recently developed tool, CoSolve-EM, in order to solve quasistatic 3D contact electro-mechanics for a clamped-clamped beam, calculating full displacement, capacitance and contact force vs. voltage. We then extend the simulations to two design variations of the beam which permit engineering of its hysteresis characteristics

Keywords

CAD; digital simulation; hysteresis; mechanical engineering computing; micromechanical devices; 3D modeling; CoSolve-EM; capacitance; clamped-clamped beam; contact force; coupled electro-mechanics; displacement; electromechanical hysteresis; hysteresis; quasistatic 3D contact electro-mechanics; Capacitance; Electrodes; Electrostatics; Hydraulic actuators; Hysteresis; Micromechanical devices; Nonlinear equations; Sensor phenomena and characterization; Springs; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on

Conference_Location

San Diego, CA

Print_ISBN

0-7803-2985-6

Type

conf

DOI

10.1109/MEMSYS.1996.493841

Filename

493841