Title :
Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal deposition
Author :
Deladi, S. ; Tas, N.R. ; Berenschot, J.W. ; de Boer, J.H. ; de Boer, M.J. ; Krijnen, G.J.M. ; Elwenspoek, M.C.
Author_Institution :
MESA+ Res. Inst., Twente Univ., Enschede, Netherlands
fDate :
30 Jan.-3 Feb. 2005
Abstract :
We present a device that enables nanoelectrochemical deposition using atomic force microscope. The micromachined fountain pen is a probe that consists of a fluidic reservoir, fluidic channels encapsulated in cantilevers and a pyramidal probe tip by which the fluid transfer to the sample surface takes place. Electrochemical metal deposition occurs on a sample surface when electrical current is driven through the electrical circuit, which is closed by the electrolyte solution. The smallest features that we succeeded depositing with this technique up till now are 3 nm high and 250 nm wide.
Keywords :
atomic force microscopy; electrodeposition; electrolytes; microfluidics; micromachining; probes; 250 nm; 3 nm; atomic force microscope; cantilevers; electrical circuit; electrical current; electrolyte solution; fluid transfer; fluidic channels; fluidic reservoir; micromachined fountain pen; nanoelectrochemical metal deposition; pyramidal probe; Atomic force microscopy; Atomic layer deposition; Chemicals; Circuits; Fabrication; Fluid flow; Fluidic microsystems; Instruments; Probes; Reservoirs;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453992