Title :
Application of surface acoustic wave spectroscopy for study of physical properties of thin films
Author :
Shayapov, Vladimir R.
Author_Institution :
Nikolaev Inst. of Inorg. Chem., Novosibirsk, Russia
Abstract :
Some possibilities of surface acoustic wave spectroscopy (SAWS) for thin films investigation are considered. Information value of SAWS method is dependent on the form of sound velocity dispersion curve. Non-linear dispersion curve allow obtaining of two values of four which describe film´s properties. Linear dispersion curve makes it possible to calculate only one film´s property. Special approach is presented to overcome this limitation. Boron carbonitride BCxNy and silicon carbonitride SiCxNyHz films are studied by SAWS. Their densities and Young´s modules are determined. The results are corresponding to known data on structure and composition of the films.
Keywords :
Young´s modulus; acoustic wave velocity; boron compounds; carbon compounds; nitrogen compounds; nonlinear acoustics; silicon compounds; surface acoustic waves; thin films; BCxNy; SAWS; SiCxNyHz; Young´s modules; boron carbonitride; linear dispersion curve; nonlinear dispersion curve; physical properties; silicon carbonitride; sound velocity dispersion curve; structural property; surface acoustic wave spectroscopy; thin films; Dispersion; Films; Silicon; Substrates; Surface acoustic waves; Young´s modulus; density; sound velocity dispersion; surface acoustic waves; thin films;
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2012 IEEE 13th International Conference and Seminar of Young Specialists on
Conference_Location :
Erlagol, Altai
Print_ISBN :
978-1-4673-2517-2
DOI :
10.1109/EDM.2012.6310197
