Application of surface acoustic wave spectroscopy for study of physical properties of thin films

Author

Shayapov, Vladimir R.

Author_Institution

Nikolaev Inst. of Inorg. Chem., Novosibirsk, Russia

fYear

2012

fDate

2-6 July 2012

Firstpage

99

Lastpage

102

Abstract

Some possibilities of surface acoustic wave spectroscopy (SAWS) for thin films investigation are considered. Information value of SAWS method is dependent on the form of sound velocity dispersion curve. Non-linear dispersion curve allow obtaining of two values of four which describe film´s properties. Linear dispersion curve makes it possible to calculate only one film´s property. Special approach is presented to overcome this limitation. Boron carbonitride BC_xN_y and silicon carbonitride SiC_xN_yH_z films are studied by SAWS. Their densities and Young´s modules are determined. The results are corresponding to known data on structure and composition of the films.

Keywords

Young´s modulus; acoustic wave velocity; boron compounds; carbon compounds; nitrogen compounds; nonlinear acoustics; silicon compounds; surface acoustic waves; thin films; BC_xN_y; SAWS; SiC_xN_yH_z; Young´s modules; boron carbonitride; linear dispersion curve; nonlinear dispersion curve; physical properties; silicon carbonitride; sound velocity dispersion curve; structural property; surface acoustic wave spectroscopy; thin films; Dispersion; Films; Silicon; Substrates; Surface acoustic waves; Young´s modulus; density; sound velocity dispersion; surface acoustic waves; thin films;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro/Nanotechnologies and Electron Devices (EDM), 2012 IEEE 13th International Conference and Seminar of Young Specialists on

Conference_Location

Erlagol, Altai

Print_ISBN

978-1-4673-2517-2

Type

conf

DOI

10.1109/EDM.2012.6310197

Filename

6310197