Title :
A Coriolis mass flow sensor structure in silicon
Author :
Enoksson, Peter ; Stemme, Göran ; Stemme, Erik
Author_Institution :
Dept. of Signals, Sensors & Syst., R. Inst. of Technol., Stockholm, Sweden
Abstract :
The first mass flow sensor in silicon based on the Coriolis force principle is presented. The basic sensor structure consists of a double-loop tube structure in silicon which can also be used for measurement of fluid density. The tube structure is excited electrostatically in a bending or torsion vibration mode. A liquid mass flow induces a Coriolis force which results in a tube twisting angular motion. The Coriolis angular motion is linearly proportional to the mass-flow and is detected optically. The measurement results show good, true mass flow direction sensitivity with high linearity in the investigated flow range below 0.5 g/s
Keywords :
Coriolis force; bending; elemental semiconductors; flow measurement; flowmeters; microsensors; semiconductor technology; silicon; vibrations; Coriolis mass flow sensor; Si; bending; double-loop tube structure; linearity; liquid mass flow; mass flow direction sensitivity; measurement of fluid density; optical detection; torsion vibration mode; tube twisting angular motion; Density measurement; Electrostatic measurements; Fluid flow; Fluid flow measurement; Force sensors; Linearity; Motion detection; Optical detectors; Optical sensors; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-2985-6
DOI :
10.1109/MEMSYS.1996.493846
