Title :
Rapid manufacturing of embedded microchannels from a single layfrei SU-8, and determining the dependence of SU-8 young´s modulus on exposure dose with a laser acoustic technique
Author :
Yu, H. ; Balogun, O. ; Li, B. ; Murray, T.W. ; Zhang, X.
fDate :
30 Jan.-3 Feb. 2005
Keywords :
Biological materials; Etching; Fabrication; Laser theory; Microchannel; Microfluidics; Microscopy; Pulp manufacturing; Resists; Space technology;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1454014
