System-level modeling and simulation of a frequency-tunable electrostatic energy harvester

In this contribution we present system-level modeling and simulation results for an electrostatic energy harvester with electrically adjustable operation frequency. The device is able to convert mechanical energy present in ambient vibrations into electrical energy. The energy is stored by charging a capacitor and available at constant voltage. The lumped model of the harvester includes the mass-dynamics of the resonator, squeeze film damping and circuitry. The mechanical and electrical domain are coupled via an electrostatic transducer. Additional electrostatic actuators are integrated with the structure for tuning the resonance frequency of the resonator. The model allows to determine the mass displacement magnitude and the electrical net power output under external vibration excitation.