• DocumentCode
    3424544
  • Title

    Monolithic MCP using photosensitive glass

  • Author

    Sakamoto, T. ; Takahashi, K. ; Takeuchi, S.

  • Author_Institution
    Dept. of Electron., Saitama Univ., Urawa, Japan
  • fYear
    1995
  • fDate
    4-6 Dec 1995
  • Firstpage
    175
  • Lastpage
    178
  • Abstract
    Micro Channel Plates (MCPs) using photosensitive glass and PbO films for secondary electron multiplication have been developed. The diameter of the microchannels and the channel pitch of the fabricated MCP are 70 μm and 81 μm, respectively. The average value of the aspect ratio of the microchannels is about 11. PbO films deposited on the internal surface of microchannels were produced by the sol-gel method. The electron gain of the MCP is about 27 at the dynode voltage of 400 V
  • Keywords
    image intensifiers; lead compounds; microchannel plates; optical glass; photomultipliers; secondary electron emission; sol-gel processing; 400 V; 70 micron; 81 micron; PbOSiO2; aspect ratio; channel pitch; dynode voltage; electron gain; micro channel plates; photosensitive glass; secondary electron multiplication; sol-gel method; Colloidal crystals; Crystallization; Electrons; Etching; Glass; Hafnium; Integrated circuit technology; Microchannel; Silicon; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Manufacturing Technology Symposium, 1995, Proceedings of 1995 Japan International, 18th IEEE/CPMT International
  • Conference_Location
    Omiya
  • Print_ISBN
    0-7803-3622-4
  • Type

    conf

  • DOI
    10.1109/IEMT.1995.541021
  • Filename
    541021