DocumentCode
3424640
Title
The design of film thickness measure system based on capacitance sensor
Author
Xiong, Xianming ; Cheng, Dapeng ; Liu, RuiZhe ; Chen, Jian
Author_Institution
Sch. of Electron. Eng., Guilin Univ. of Electron. Technol., Guilin, China
fYear
2010
fDate
22-24 Oct. 2010
Firstpage
334
Lastpage
336
Abstract
According to the practical needs, a film thickness measure system based on capacitance sensor are designed integrated with the features of this kind of sensor. In this thesis, first analyzed the measure principle of capacitance sensor, and introduced the each component of this system, following elaborated working principle of high precision capacitance/ voltage converter IC CAV444 and its circuit design, at last, displayed the result of the overall test. The results showed this system can well measure the film thickness with the Precision higher than 1 um, and can be widely used in online inspection of non-metallic material.
Keywords
capacitance measurement; capacitive sensors; thickness measurement; capacitance sensor; film thickness measure system; Educational institutions; CAV444; Capacitance Sensor; film thickness;
fLanguage
English
Publisher
ieee
Conference_Titel
Intelligent Computing and Integrated Systems (ICISS), 2010 International Conference on
Conference_Location
Guilin
Print_ISBN
978-1-4244-6834-8
Type
conf
DOI
10.1109/ICISS.2010.5656995
Filename
5656995
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