Title :
On-chip temperature gradient liquid chromatography
Author :
Shih, C.Y. ; Chen, Y. ; Xie, J. ; He, Q. ; Tai, Y.C.
Author_Institution :
California Inst. of Technol., Pasadena, CA, USA
fDate :
30 Jan.-3 Feb. 2005
Abstract :
We report here the first MEMS temperature-programmable high pressure parylene column with integrated thermal isolation and electrochemical sensor for on-chip temperature gradient liquid chromatography. Two sets of devices for different high performance liquid chromatography (HPLC) criteria were fabricated. The separation and detection of derivatized amino acids sample was successfully demonstrated. Compared with other temperature gradient HPLC systems which use "macro oven" to generate temporal temperature gradient in the column, our device\´s thermal performance is greatly improved by orders of magnitude without the sacrifice of chromatography quality.
Keywords :
chromatography; electrochemical sensors; micromechanical devices; proteins; thermal engineering; HPLC device fabrication; MEMS temperature-programmable high pressure parylene column; derivatized amino acid sample; electrochemical sensor; high performance liquid chromatography; integrated thermal isolation; on-chip temperature gradient liquid chromatography; thermal performance; Amino acids; Fabrication; Helium; Micromechanical devices; Resists; Silicon; Temperature control; Temperature sensors; Thermal conductivity; Thermal sensors;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1454046
