DocumentCode :
3425170
Title :
Section II: Design and technology of micro- and nanostructures
fYear :
2012
fDate :
2-6 July 2012
Firstpage :
43
Lastpage :
43
Abstract :
Start of the above-titled section of the conference proceedings record.
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2012 IEEE 13th International Conference and Seminar of Young Specialists on
Conference_Location :
Erlagol, Altai
Print_ISBN :
978-1-4673-2517-2
Type :
conf
DOI :
10.1109/EDM.2012.6310263
Filename :
6310263
Link To Document :
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