The micro Fabry-Perot interferometer for the spectral endoscope

This paper reports on a micro Fabry-Perot interferometer (MFPI) for the spectral endoscope which can acquire spectral images of a target at each pixel. The MFPI with the Si/Si₃N₄/Si multi-layer mirrors and the MFPI prototype were designed and fabricated. This MFPI can be used in the wavelength ranging from 400 nm to 1000 nm. The RGB image of the butterfly was taken by the spectral endoscope, which consists of the MFPI prototype, a CCD, and lenses. The image according to the peak wavelength was also acquired. Thus, we demonstrate the efficiency of the MFPI for the spectral endoscope.