System of determination of electro - physical, physical - Chemical properties and gas - sensitive characteristics of semiconductor layers of oxides in frequency area

Author

Poluyanovich, Nikolay K. ; Dubyago, Marina N. ; Matsiborko, Vladimir V.

Author_Institution

Taganrog Inst. of Technol., Southern Fed. Univ., Taganrog, Russia

fYear

2012

fDate

2-6 July 2012

Firstpage

34

Lastpage

37

Abstract

The installation for determination of electro-physical and physical - chemical properties of gas - sensitive materials (GSM) by means of measurement of electric parameters of an equivalent electric circuit was developed. Installation, for measurement of an electric impedance on frequencies by 1 MHz in a range of 100 Ohm ... 5 mega ohms is described . Stages of research of gas -sensitive properties of nano - composite materials and processes proceeding in them, for selection of the best GSM for gas sensors are described. Structures of impedance models are offered and prospects of their use for gas sensors are proved.

Keywords

electric impedance measurement; gas sensors; nanocomposites; nanoelectromechanical devices; semiconductor materials; chemical properties; electric impedance measurement; electric parameter measurement; electrophysical properties; equivalent electric circuit; frequency 1 MHz; gas sensors; gas-sensitive materials; impedance models; nanocomposite materials; semiconductor layers; Chemicals; Films; GSM; Gas detectors; Impedance; Resistance; a gas - sensitive element; a method of impedance spectroscopy; electro - physical properties; the device;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro/Nanotechnologies and Electron Devices (EDM), 2012 IEEE 13th International Conference and Seminar of Young Specialists on

Conference_Location

Erlagol, Altai

Print_ISBN

978-1-4673-2517-2

Type

conf

DOI

10.1109/EDM.2012.6310269

Filename

6310269