Title :
TEM observation of tensile deformation of silicon nanowire between micromachined sharp opposing tips
Author :
Ishida, Tadashi ; Kakushima, Kuniyuki ; Mita, Makoto ; Fujita, Hiroyuki
Author_Institution :
IIS, Tokyo Univ., Japan
fDate :
30 Jan.-3 Feb. 2005
Abstract :
Process of forming a single-crystalline silicon nanowire was successfully in-situ TEM observed for the first time in between microfabricated silicon probe tips driven by integrated electrostatic microactuators; the I-V characteristics of silicon nanowire was correlated with TEM in-situ observation of the wire upon its formation (by tip contact), extension, and extinction.
Keywords :
deformation; electrostatic actuators; nanowires; transmission electron microscopy; I-V characteristics; TEM observation; integrated electrostatic microactuators; microfabricated silicon probe tips; silicon nanowires; single-crystalline silicon nanowire; tensile deformation; Actuators; Electrodes; Electrostatics; Etching; Fabrication; Microactuators; Micromechanical devices; Silicon; Transmission electron microscopy; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1454070
