• DocumentCode
    3425576
  • Title

    [Breaker page]

  • fYear
    2005
  • fDate
    Jan. 30 2005-Feb. 3 2005
  • Firstpage
    887
  • Lastpage
    887
  • Abstract
    Breaker page.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
  • Conference_Location
    Miami Beach, FL, USA
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-8732-5
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2005.1454072
  • Filename
    1454072