DocumentCode
3425576
Title
[Breaker page]
fYear
2005
fDate
Jan. 30 2005-Feb. 3 2005
Firstpage
887
Lastpage
887
Abstract
Breaker page.
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Conference_Location
Miami Beach, FL, USA
ISSN
1084-6999
Print_ISBN
0-7803-8732-5
Type
conf
DOI
10.1109/MEMSYS.2005.1454072
Filename
1454072
Link To Document