A decade of MEMS and its future

Author

Fujita, Hiroyuki

Author_Institution

Inst. of Ind. Sci., Tokyo Univ., Japan

fYear

1997

fDate

26-30 Jan 1997

Firstpage

1

Lastpage

7

Abstract

This paper deals with a history of microelectromechanical system (MEMS) development in this decade. An overview of the MEMS research topics is also given. The topics include microactuators, microsensors, micro miniature motion-systems (e.g. microrobots), applications and the fabrication technology in involved. MEMS is supposed to contribute the 21th Century society in three major areas such as (1) wider distribution of and easier access to information, (2) compatible lifestyle with environment and (3) improvement in social welfare. The technological issues for future development of MEMS are discussed

Keywords

microactuators; micromachining; micromechanical devices; micromotors; microsensors; MEMS; arrayed actuators; biotechnology; environment; fabrication technology; fluidics; micro miniature motion-systems; microactuators; microelectromechanical system; micromachining; microrobots; microsensors; optics; social welfare; Biological materials; Chemical technology; Fabrication; History; Integrated circuit technology; Mechanical sensors; Microactuators; Microelectronics; Micromachining; Micromechanical devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on

Conference_Location

Nagoya

ISSN

1084-6999

Print_ISBN

0-7803-3744-1

Type

conf

DOI

10.1109/MEMSYS.1997.581729

Filename

581729