Title :
A decade of MEMS and its future
Author :
Fujita, Hiroyuki
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ., Japan
Abstract :
This paper deals with a history of microelectromechanical system (MEMS) development in this decade. An overview of the MEMS research topics is also given. The topics include microactuators, microsensors, micro miniature motion-systems (e.g. microrobots), applications and the fabrication technology in involved. MEMS is supposed to contribute the 21th Century society in three major areas such as (1) wider distribution of and easier access to information, (2) compatible lifestyle with environment and (3) improvement in social welfare. The technological issues for future development of MEMS are discussed
Keywords :
microactuators; micromachining; micromechanical devices; micromotors; microsensors; MEMS; arrayed actuators; biotechnology; environment; fabrication technology; fluidics; micro miniature motion-systems; microactuators; microelectromechanical system; micromachining; microrobots; microsensors; optics; social welfare; Biological materials; Chemical technology; Fabrication; History; Integrated circuit technology; Mechanical sensors; Microactuators; Microelectronics; Micromachining; Micromechanical devices;
Conference_Titel :
Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-3744-1
DOI :
10.1109/MEMSYS.1997.581729
