Title :
Grand in purpose insignificant in size
Author :
Trimmer, William
Author_Institution :
Belle Mead Res., NJ, USA
Abstract :
The field of micromechanics (also called MEMS or Micro System Technology or Micro Machines) describes a whole new realm of human endeavor. The author discusses the past developments of this technology and considers future trends and prospects
Keywords :
micromachining; micromechanical devices; MEMS; micromechanics; surface micromachining; Automobiles; Costs; Diffraction gratings; Foot; Horses; Humans; Machinery; Micromechanical devices; Physics; Thermal stability;
Conference_Titel :
Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-3744-1
DOI :
10.1109/MEMSYS.1997.581730
