• DocumentCode
    3425844
  • Title

    Grand in purpose insignificant in size

  • Author

    Trimmer, William

  • Author_Institution
    Belle Mead Res., NJ, USA
  • fYear
    1997
  • fDate
    26-30 Jan 1997
  • Firstpage
    9
  • Lastpage
    13
  • Abstract
    The field of micromechanics (also called MEMS or Micro System Technology or Micro Machines) describes a whole new realm of human endeavor. The author discusses the past developments of this technology and considers future trends and prospects
  • Keywords
    micromachining; micromechanical devices; MEMS; micromechanics; surface micromachining; Automobiles; Costs; Diffraction gratings; Foot; Horses; Humans; Machinery; Micromechanical devices; Physics; Thermal stability;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
  • Conference_Location
    Nagoya
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-3744-1
  • Type

    conf

  • DOI
    10.1109/MEMSYS.1997.581730
  • Filename
    581730
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3425844