Integrated micro-laser displacement sensor

Author

Sawada, R. ; Higurashi, Eiji ; Ito, T. ; Tsubamoto, M. ; Ohguchi, O.

Author_Institution

NTT Opto-Electron. Labs., Ibaraki, Japan

fYear

1997

fDate

26-30 Jan 1997

Firstpage

19

Lastpage

24

Abstract

A new integrated optical microlaser displacement sensor including a Michelson interferometer was developed and its feasibility as a measurement device was confirmed. It can measure the relative distance traveled against an outside reflective mirror. The measurement resolution is expected to be on the order of 0.01 μm. Its dimensions are 2.0 mm by 1.6 mm. Therefore, the displacement sensor itself can be moved at high speed and can be incorporated into a micromachine because its inertia is extremely small

Keywords

Michelson interferometers; displacement measurement; measurement by laser beam; microsensors; mirrors; optical sensors; 1.6 mm; 2 mm; Michelson interferometer; integrated optical microlaser displacement sensor; measurement resolution; micromachine; outside reflective mirror; relative distance; Diode lasers; Displacement measurement; Laser beams; Mirrors; Optical devices; Optical interferometry; Optical sensors; Optical waveguides; Photodiodes; Waveguide lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on

Conference_Location

Nagoya

ISSN

1084-6999

Print_ISBN

0-7803-3744-1

Type

conf

DOI

10.1109/MEMSYS.1997.581757

Filename

581757