Title :
Integrated micro-laser displacement sensor
Author :
Sawada, R. ; Higurashi, Eiji ; Ito, T. ; Tsubamoto, M. ; Ohguchi, O.
Author_Institution :
NTT Opto-Electron. Labs., Ibaraki, Japan
Abstract :
A new integrated optical microlaser displacement sensor including a Michelson interferometer was developed and its feasibility as a measurement device was confirmed. It can measure the relative distance traveled against an outside reflective mirror. The measurement resolution is expected to be on the order of 0.01 μm. Its dimensions are 2.0 mm by 1.6 mm. Therefore, the displacement sensor itself can be moved at high speed and can be incorporated into a micromachine because its inertia is extremely small
Keywords :
Michelson interferometers; displacement measurement; measurement by laser beam; microsensors; mirrors; optical sensors; 1.6 mm; 2 mm; Michelson interferometer; integrated optical microlaser displacement sensor; measurement resolution; micromachine; outside reflective mirror; relative distance; Diode lasers; Displacement measurement; Laser beams; Mirrors; Optical devices; Optical interferometry; Optical sensors; Optical waveguides; Photodiodes; Waveguide lasers;
Conference_Titel :
Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-3744-1
DOI :
10.1109/MEMSYS.1997.581757
